Cargando…
Design and Verification of Humidity Sensors Based on Magnesium Oxide Micro-Arc Oxidation Film Layers
Humidity detection range is an important indicator for measuring the performance of humidity sensors, but semiconductor humidity sensors often face the problems of narrow detection ranges and insufficient detection sensitivities. In this paper, a magnesium oxide (MgO) humidity sensor based on micro-...
Autores principales: | , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7146567/ https://www.ncbi.nlm.nih.gov/pubmed/32244991 http://dx.doi.org/10.3390/s20061736 |
_version_ | 1783520230984646656 |
---|---|
author | Pan, Mingqiang Sheng, Jun Liu, Jizhu Shi, Zeming Jiu, Lei |
author_facet | Pan, Mingqiang Sheng, Jun Liu, Jizhu Shi, Zeming Jiu, Lei |
author_sort | Pan, Mingqiang |
collection | PubMed |
description | Humidity detection range is an important indicator for measuring the performance of humidity sensors, but semiconductor humidity sensors often face the problems of narrow detection ranges and insufficient detection sensitivities. In this paper, a magnesium oxide (MgO) humidity sensor based on micro-arc oxidation (MAO) technology was designed to solve these problems by simultaneously using impedance and capacitance as the response signals, as well as by normalizing the output of the two signals. The experimental results showed that the average output of the micro-arc MgO ceramic film, with impedance as the response signal, could reach 150 in the low relative humidity(RH) range (11.3–67% RH), which was much higher than its sensitivity in the high humidity range (< 1), and the film showed fast response (13 s) and recovery (61 s). Under high humidity conditions (67–97.3% RH), with capacitance as the response signal, the output of the micro-arc MgO was as high as 120. Therefore, the micro-arc MgO humidity sensor with impedance, and the sensor with capacitance as the response signal, demonstrated good stability in low humidity and in high humidity environments, respectively, indicating that the method of selecting appropriate response signals for different humidity environments can be applied to extend the humidity detection range of sensing material, and to improve the humidity detection capability of a sensor. |
format | Online Article Text |
id | pubmed-7146567 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2020 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-71465672020-04-20 Design and Verification of Humidity Sensors Based on Magnesium Oxide Micro-Arc Oxidation Film Layers Pan, Mingqiang Sheng, Jun Liu, Jizhu Shi, Zeming Jiu, Lei Sensors (Basel) Article Humidity detection range is an important indicator for measuring the performance of humidity sensors, but semiconductor humidity sensors often face the problems of narrow detection ranges and insufficient detection sensitivities. In this paper, a magnesium oxide (MgO) humidity sensor based on micro-arc oxidation (MAO) technology was designed to solve these problems by simultaneously using impedance and capacitance as the response signals, as well as by normalizing the output of the two signals. The experimental results showed that the average output of the micro-arc MgO ceramic film, with impedance as the response signal, could reach 150 in the low relative humidity(RH) range (11.3–67% RH), which was much higher than its sensitivity in the high humidity range (< 1), and the film showed fast response (13 s) and recovery (61 s). Under high humidity conditions (67–97.3% RH), with capacitance as the response signal, the output of the micro-arc MgO was as high as 120. Therefore, the micro-arc MgO humidity sensor with impedance, and the sensor with capacitance as the response signal, demonstrated good stability in low humidity and in high humidity environments, respectively, indicating that the method of selecting appropriate response signals for different humidity environments can be applied to extend the humidity detection range of sensing material, and to improve the humidity detection capability of a sensor. MDPI 2020-03-20 /pmc/articles/PMC7146567/ /pubmed/32244991 http://dx.doi.org/10.3390/s20061736 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Pan, Mingqiang Sheng, Jun Liu, Jizhu Shi, Zeming Jiu, Lei Design and Verification of Humidity Sensors Based on Magnesium Oxide Micro-Arc Oxidation Film Layers |
title | Design and Verification of Humidity Sensors Based on Magnesium Oxide Micro-Arc Oxidation Film Layers |
title_full | Design and Verification of Humidity Sensors Based on Magnesium Oxide Micro-Arc Oxidation Film Layers |
title_fullStr | Design and Verification of Humidity Sensors Based on Magnesium Oxide Micro-Arc Oxidation Film Layers |
title_full_unstemmed | Design and Verification of Humidity Sensors Based on Magnesium Oxide Micro-Arc Oxidation Film Layers |
title_short | Design and Verification of Humidity Sensors Based on Magnesium Oxide Micro-Arc Oxidation Film Layers |
title_sort | design and verification of humidity sensors based on magnesium oxide micro-arc oxidation film layers |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7146567/ https://www.ncbi.nlm.nih.gov/pubmed/32244991 http://dx.doi.org/10.3390/s20061736 |
work_keys_str_mv | AT panmingqiang designandverificationofhumiditysensorsbasedonmagnesiumoxidemicroarcoxidationfilmlayers AT shengjun designandverificationofhumiditysensorsbasedonmagnesiumoxidemicroarcoxidationfilmlayers AT liujizhu designandverificationofhumiditysensorsbasedonmagnesiumoxidemicroarcoxidationfilmlayers AT shizeming designandverificationofhumiditysensorsbasedonmagnesiumoxidemicroarcoxidationfilmlayers AT jiulei designandverificationofhumiditysensorsbasedonmagnesiumoxidemicroarcoxidationfilmlayers |