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Design and Verification of Humidity Sensors Based on Magnesium Oxide Micro-Arc Oxidation Film Layers

Humidity detection range is an important indicator for measuring the performance of humidity sensors, but semiconductor humidity sensors often face the problems of narrow detection ranges and insufficient detection sensitivities. In this paper, a magnesium oxide (MgO) humidity sensor based on micro-...

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Detalles Bibliográficos
Autores principales:	Pan, Mingqiang, Sheng, Jun, Liu, Jizhu, Shi, Zeming, Jiu, Lei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7146567/ https://www.ncbi.nlm.nih.gov/pubmed/32244991 http://dx.doi.org/10.3390/s20061736

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