A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing

In this paper we demonstrate a novel acoustic wave pressure sensor, based on an aluminum nitride (AlN) piezoelectric thin film. It contains an integrated vacuum cavity, which is micro-fabricated using a cavity silicon-on-insulator (SOI) wafer. This sensor can directly measure the absolute pressure w...

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Detalles Bibliográficos
Autores principales: Wang, Tao, Tang, Zhengjie, Lin, Huamao, Zhan, Kun, Wan, Jiang, Wu, Shihao, Gu, Yuandong, Luo, Wenbo, Zhang, Wanli
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7147155/
https://www.ncbi.nlm.nih.gov/pubmed/32213862
http://dx.doi.org/10.3390/s20061788

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