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Zinc Oxide Films with High Transparency and Crystallinity Prepared by a Low Temperature Spatial Atomic Layer Deposition Process

Zinc oxide (ZnO) attracts much attention owing to its remarkable electrical and optical properties for applications in optoelectronics. In this study, ZnO thin films were prepared by spatial atomic layer deposition with diethylzinc and water as precursors. The substrate temperature was varied from 5...

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Detalles Bibliográficos
Autores principales:	Zhao, Ming-Jie, Sun, Zhi-Tao, Hsu, Chia-Hsun, Huang, Pao-Hsun, Zhang, Xiao-Ying, Wu, Wan-Yu, Gao, Peng, Qiu, Yu, Lien, Shui-Yang, Zhu, Wen-Zhang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7152997/ https://www.ncbi.nlm.nih.gov/pubmed/32143520 http://dx.doi.org/10.3390/nano10030459

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