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Thin-Film Engineering of Mechanical Fragmentation Properties of Atomic-Layer-Deposited Metal Oxides

Mechanical fracture properties were studied for the common atomic-layer-deposited Al(2)O(3), ZnO, TiO(2), ZrO(2), and Y(2)O(3) thin films, and selected multilayer combinations via uniaxial tensile testing and Weibull statistics. The crack onset strains and interfacial shear strains were studied, and...

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Detalles Bibliográficos
Autores principales:	Ruoho, Mikko, Niemelä, Janne-Petteri, Guerra-Nunez, Carlos, Tarasiuk, Natalia, Robertson, Georgina, Taylor, Aidan A., Maeder, Xavier, Kapusta, Czeslaw, Michler, Johann, Utke, Ivo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7153380/ https://www.ncbi.nlm.nih.gov/pubmed/32204547 http://dx.doi.org/10.3390/nano10030558

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