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Self-Compliance and High Performance Pt/HfO(x)/Ti RRAM Achieved through Annealing

A self-compliance resistive random access memory (RRAM) achieved through thermal annealing of a Pt/HfO(x)/Ti structure. The electrical characteristic measurements show that the forming voltage of the device annealing at 500 °C decreased, and the switching ratio and uniformity improved. Tests on the...

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Detalles Bibliográficos
Autores principales:	Wu, Lei, Liu, Hongxia, Lin, Jinfu, Wang, Shulong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7153612/ https://www.ncbi.nlm.nih.gov/pubmed/32143299 http://dx.doi.org/10.3390/nano10030457

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