Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) Method

The current work aimed to characterize the morphology, chemical, and mechanical properties of Pt and PtTi thin films deposited via thermionic vacuum arc (TVA) method on glass and silicon substrates. The deposited thin films were characterized by means of a scanning electron microscope technique (SEM...

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Detalles Bibliográficos
Autores principales: Cozma, Sebastian, Vlǎdoiu, Rodica, Mandes, Aurelia, Dinca, Virginia, Prodan, Gabriel, Buršíková, Vilma
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7179031/
https://www.ncbi.nlm.nih.gov/pubmed/32290226
http://dx.doi.org/10.3390/ma13071796

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