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Area-Selective Atomic Layer Deposition of Two-Dimensional WS(2) Nanolayers

[Image: see text] With downscaling of device dimensions, two-dimensional (2D) semiconducting transition metal dichalcogenides (TMDs) such as WS(2) are being considered as promising materials for future applications in nanoelectronics. However, at these nanoscale regimes, incorporating TMD layers in...

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Detalles Bibliográficos
Autores principales:	Balasubramanyam, Shashank, Merkx, Marc J. M., Verheijen, Marcel A., Kessels, Wilhelmus M. M., Mackus, Adriaan J. M., Bol, Ageeth A.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2020
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7217612/ https://www.ncbi.nlm.nih.gov/pubmed/32421046 http://dx.doi.org/10.1021/acsmaterialslett.0c00093

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