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Oven-Controlled MEMS Oscillator with Integrated Micro-Evaporation Trimming

This study reports an oven-controlled microelectromechanical systems oscillator with integrated micro-evaporation trimming that achieves frequency stability over the industrial temperature range and permanent frequency trimming after vacuum packaging. The length-extensional-mode resonator is micro-o...

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Detalles Bibliográficos
Autores principales:	Pei, Binbin, Sun, Ke, Yang, Heng, Ye, Chaozhan, Zhong, Peng, Yu, Tingting, Li, Xinxin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7219346/ https://www.ncbi.nlm.nih.gov/pubmed/32331277 http://dx.doi.org/10.3390/s20082373

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