Exploring Strategies to Contact 3D Nano-Pillars

This contribution explores different strategies to electrically contact vertical pillars with diameters less than 100 nm. Two process strategies have been defined, the first based on Atomic Force Microscope (AFM) indentation and the second based on planarization and reactive ion etching (RIE). We ha...

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Detalles Bibliográficos
Autores principales: Amat, Esteve, del Moral, Alberto, Fernández-Regúlez, Marta, Evangelio, Laura, Lorenzoni, Matteo, Gharbi, Ahmed, Rademaker, Guido, Pourteau, Marie-Line, Tiron, Raluca, Bausells, Joan, Perez-Murano, Francesc
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7221787/
https://www.ncbi.nlm.nih.gov/pubmed/32290062
http://dx.doi.org/10.3390/nano10040716
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author Amat, Esteve
del Moral, Alberto
Fernández-Regúlez, Marta
Evangelio, Laura
Lorenzoni, Matteo
Gharbi, Ahmed
Rademaker, Guido
Pourteau, Marie-Line
Tiron, Raluca
Bausells, Joan
Perez-Murano, Francesc
author_facet Amat, Esteve
del Moral, Alberto
Fernández-Regúlez, Marta
Evangelio, Laura
Lorenzoni, Matteo
Gharbi, Ahmed
Rademaker, Guido
Pourteau, Marie-Line
Tiron, Raluca
Bausells, Joan
Perez-Murano, Francesc
author_sort Amat, Esteve
collection PubMed
description This contribution explores different strategies to electrically contact vertical pillars with diameters less than 100 nm. Two process strategies have been defined, the first based on Atomic Force Microscope (AFM) indentation and the second based on planarization and reactive ion etching (RIE). We have demonstrated that both proposals provide suitable contacts. The results help to conclude that the most feasible strategy to be implementable is the one using planarization and reactive ion etching since it is more suitable for parallel and/or high-volume manufacturing processing.
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spelling pubmed-72217872020-05-21 Exploring Strategies to Contact 3D Nano-Pillars Amat, Esteve del Moral, Alberto Fernández-Regúlez, Marta Evangelio, Laura Lorenzoni, Matteo Gharbi, Ahmed Rademaker, Guido Pourteau, Marie-Line Tiron, Raluca Bausells, Joan Perez-Murano, Francesc Nanomaterials (Basel) Article This contribution explores different strategies to electrically contact vertical pillars with diameters less than 100 nm. Two process strategies have been defined, the first based on Atomic Force Microscope (AFM) indentation and the second based on planarization and reactive ion etching (RIE). We have demonstrated that both proposals provide suitable contacts. The results help to conclude that the most feasible strategy to be implementable is the one using planarization and reactive ion etching since it is more suitable for parallel and/or high-volume manufacturing processing. MDPI 2020-04-10 /pmc/articles/PMC7221787/ /pubmed/32290062 http://dx.doi.org/10.3390/nano10040716 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Amat, Esteve
del Moral, Alberto
Fernández-Regúlez, Marta
Evangelio, Laura
Lorenzoni, Matteo
Gharbi, Ahmed
Rademaker, Guido
Pourteau, Marie-Line
Tiron, Raluca
Bausells, Joan
Perez-Murano, Francesc
Exploring Strategies to Contact 3D Nano-Pillars
title Exploring Strategies to Contact 3D Nano-Pillars
title_full Exploring Strategies to Contact 3D Nano-Pillars
title_fullStr Exploring Strategies to Contact 3D Nano-Pillars
title_full_unstemmed Exploring Strategies to Contact 3D Nano-Pillars
title_short Exploring Strategies to Contact 3D Nano-Pillars
title_sort exploring strategies to contact 3d nano-pillars
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7221787/
https://www.ncbi.nlm.nih.gov/pubmed/32290062
http://dx.doi.org/10.3390/nano10040716
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