Silicon Conical Structures by Metal Assisted Chemical Etching

A simple and inexpensive method to obtain Si conical structures is proposed. The method consists of a sequence of steps that include photolithography and metal assisted chemical etching (MACE) to create porous regions that are dissolved in a post-etching process. The proposed process takes advantage...

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Detalles Bibliográficos
Autores principales: Pérez-Díaz, Oscar, Quiroga-González, Enrique
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7231320/
https://www.ncbi.nlm.nih.gov/pubmed/32290505
http://dx.doi.org/10.3390/mi11040402

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7231320/
https://www.ncbi.nlm.nih.gov/pubmed/32290505
http://dx.doi.org/10.3390/mi11040402

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