Cargando…

Silicon Conical Structures by Metal Assisted Chemical Etching

A simple and inexpensive method to obtain Si conical structures is proposed. The method consists of a sequence of steps that include photolithography and metal assisted chemical etching (MACE) to create porous regions that are dissolved in a post-etching process. The proposed process takes advantage...

Descripción completa

Detalles Bibliográficos
Autores principales:	Pérez-Díaz, Oscar, Quiroga-González, Enrique
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7231320/ https://www.ncbi.nlm.nih.gov/pubmed/32290505 http://dx.doi.org/10.3390/mi11040402

Ejemplares similares

Deep Etching of Silicon Based on Metal-Assisted Chemical Etching
por: Nur’aini, Anafi, et al.
Publicado: (2022)

Optimization of Metal-Assisted Chemical Etching for Deep Silicon Nanostructures
por: Akan, Rabia, et al.
Publicado: (2021)

Catalytic activity of noble metals for metal-assisted chemical etching of silicon
por: Yae, Shinji, et al.
Publicado: (2012)

Nonlinear Etch Rate of Au-Assisted Chemical Etching of Silicon
por: Choi, Keorock, et al.
Publicado: (2017)

Silicon Nanowires Synthesis by Metal-Assisted Chemical Etching: A Review
por: Leonardi, Antonio Alessio, et al.
Publicado: (2021)

Unraveling the Morphological Evolution and Etching Kinetics of Porous Silicon Nanowires During Metal-Assisted Chemical Etching
por: Vinzons, Lester U., et al.
Publicado: (2017)

Fabrication of Silicon Nanowires by Metal-Assisted Chemical Etching Combined with Micro-Vibration
por: Huang, Weiye, et al.
Publicado: (2023)

Optical assessment of silicon nanowire arrays fabricated by metal-assisted chemical etching
por: Kato, Shinya, et al.
Publicado: (2013)

The mechanism of galvanic/metal-assisted etching of silicon
por: Kolasinski, Kurt W
Publicado: (2014)

Structural and Optical Properties of Silicon Nanowire Arrays Fabricated by Metal Assisted Chemical Etching With Ammonium Fluoride
por: Gonchar, Kirill A., et al.
Publicado: (2019)

Mesopore Formation and Silicon Surface Nanostructuration by Metal-Assisted Chemical Etching With Silver Nanoparticles
por: Pinna, Elisa, et al.
Publicado: (2020)

Antireflective silicon nanostructures with hydrophobicity by metal-assisted chemical etching for solar cell applications
por: Yeo, ChanIl, et al.
Publicado: (2013)

Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching
por: Liu, Ruiyuan, et al.
Publicado: (2013)

Sub-100-nm ordered silicon hole arrays by metal-assisted chemical etching
por: Asoh, Hidetaka, et al.
Publicado: (2013)

Reaction control of metal-assisted chemical etching for silicon-based zone plate nanostructures
por: Akan, Rabia, et al.
Publicado: (2018)

Versatile control of metal-assisted chemical etching for vertical silicon microwire arrays and their photovoltaic applications
por: Um, Han-Don, et al.
Publicado: (2015)

Reduction of Nitroaromatics by Gold Nanoparticles on Porous Silicon Fabricated Using Metal-Assisted Chemical Etching
por: Liang, Ling-Yi, et al.
Publicado: (2023)

Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching
por: Kim, Tae Kyoung, et al.
Publicado: (2020)

Interfacial Contact is Required for Metal-Assisted Plasma Etching of Silicon
por: Sun, Julia B., et al.
Publicado: (2018)

Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon
por: Kong, Lingyu, et al.
Publicado: (2016)

Crystallographically Determined Etching and Its Relevance to the Metal-Assisted Catalytic Etching (MACE) of Silicon Powders
por: Kolasinski, Kurt W., et al.
Publicado: (2019)

Large-Scale Synthesis of Highly Uniform Silicon Nanowire Arrays Using Metal-Assisted Chemical Etching
por: Wendisch, Fedja J., et al.
Publicado: (2020)

Gold-thickness-dependent Schottky barrier height for charge transfer in metal-assisted chemical etching of silicon
por: Zuo, Zewen, et al.
Publicado: (2013)

The Enhanced Light Absorptance and Device Application of Nanostructured Black Silicon Fabricated by Metal-assisted Chemical Etching
por: Zhong, Hao, et al.
Publicado: (2016)

Fabrication of a Silicon Electron Multiplier sensor using Metal Assisted Chemical Etching and its characterisation
por: Halvorsen, Marius Mæhlum, et al.
Publicado: (2023)

Wafer-Scale Fabrication of Ultra-High Aspect Ratio, Microscale Silicon Structures with Smooth Sidewalls Using Metal Assisted Chemical Etching
por: Zhang, Xiaomeng, et al.
Publicado: (2023)

Optical properties of silicon nanowire arrays formed by metal-assisted chemical etching: evidences for light localization effect
por: Osminkina, Liubov A, et al.
Publicado: (2012)

Formation and Evaluation of Silicon Substrate with Highly-Doped Porous Si Layers Formed by Metal-Assisted Chemical Etching
por: Li, Yijie, et al.
Publicado: (2021)

Investigation of the Pd Nanoparticles-Assisted Chemical Etching of Silicon for Ethanol Solution Electrooxidation
por: Volovlikova, Olga, et al.
Publicado: (2019)

Engineering Silicon to Porous Silicon and Silicon Nanowires by Metal-Assisted Chemical Etching: Role of Ag Size and Electron-Scavenging Rate on Morphology Control and Mechanism
por: Rajkumar, Kanakaraj, et al.
Publicado: (2017)

Enhanced Photoluminescence of R6G Dyes from Metal Decorated Silicon Nanowires Fabricated through Metal Assisted Chemical Etching
por: Kochylas, Ioannis, et al.
Publicado: (2023)

Doping density, not valency, influences catalytic metal-assisted plasma etching of silicon
por: Sun, Julia B, et al.
Publicado: (2023)

Fabrication and photocatalytic properties of silicon nanowires by metal-assisted chemical etching: effect of H(2)O(2) concentration
por: Liu, Yousong, et al.
Publicado: (2012)

Wafer-Scale Fabrication of Silicon Nanocones via Controlling Catalyst Evolution in All-Wet Metal-Assisted Chemical Etching
por: Bian, Chenyu, et al.
Publicado: (2022)

Machine Learning to Improve the Sensing of Biomolecules by Conical Track-Etched Nanopore
por: Meyer, Nathan, et al.
Publicado: (2020)

Elaboration of Silicon Nanostructures with Vapor-Phase Silver Assisted Chemical Etching: Correlation between Structural and Optical Properties
por: Amri, Chohdi, et al.
Publicado: (2023)

Formation of silicon nanowire packed films from metallurgical-grade silicon powder using a two-step metal-assisted chemical etching method
por: Ouertani, Rachid, et al.
Publicado: (2014)

Electrical Contacts on Silicon Nanowires Produced by Metal-Assisted Etching: a Comparative Approach
por: D’Ortenzi, L., et al.
Publicado: (2016)

Metal-Assisted Chemical Etching for Anisotropic Deep Trenching of GaN Array
por: Wang, Qi, et al.
Publicado: (2021)

Triangle pore arrays fabricated on Si (111) substrate by sphere lithography combined with metal-assisted chemical etching and anisotropic chemical etching
por: Asoh, Hidetaka, et al.
Publicado: (2012)

Cannot write session to /tmp/vufind_sessions/sess_8vh771uvmkrqbli7tknj1cv1pd