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Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

This article reviews the state-of-the -art of mechanical material properties and measurement methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas-assisted focused electron and focused ion beam-induced deposition using volatile organic and organometallic precursors....

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Detalles Bibliográficos
Autores principales:	Utke, Ivo, Michler, Johann, Winkler, Robert, Plank, Harald
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7231341/ https://www.ncbi.nlm.nih.gov/pubmed/32290292 http://dx.doi.org/10.3390/mi11040397

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