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Optical Etching to Pattern Microstructures on Plastics by Vacuum Ultraviolet Light
We proposed and demonstrated an optical dry etching method for transferring a pattern on a photomask to a surface of plastics by decomposing the irradiated area using the high energy of vacuum ultraviolet light (VUV) at room temperature and pressure. Two kinds of wavelengths of 160 nm and 172 nm wer...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7254391/ https://www.ncbi.nlm.nih.gov/pubmed/32403429 http://dx.doi.org/10.3390/ma13092206 |