Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method

Optical polyimide (PI) membrane is a promising substrate material for diffractive lens applied in future large-aperture space based imaging system because of its light weight, environmental adaptability and deployable feature. In this letter, we put forward a facile large-area uniform photolithograp...

Descripción completa

Detalles Bibliográficos
Autores principales: Gao, Guohan, Wang, Lihua, Shi, Heng, Liu, Dun, Fan, Bin, Guan, Chunlin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7265484/
https://www.ncbi.nlm.nih.gov/pubmed/32488172
http://dx.doi.org/10.1038/s41598-020-65990-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7265484/
https://www.ncbi.nlm.nih.gov/pubmed/32488172
http://dx.doi.org/10.1038/s41598-020-65990-2

Ejemplares similares