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Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method
Optical polyimide (PI) membrane is a promising substrate material for diffractive lens applied in future large-aperture space based imaging system because of its light weight, environmental adaptability and deployable feature. In this letter, we put forward a facile large-area uniform photolithograp...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7265484/ https://www.ncbi.nlm.nih.gov/pubmed/32488172 http://dx.doi.org/10.1038/s41598-020-65990-2 |