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Fabrication of Microbolometer Arrays Based on Polymorphous Silicon–Germanium

This work reports the development of arrays of infrared sensors (microbolometers) using a hydrogenated polymorphous silicon–germanium alloy (pm-Si(x)Ge(1-x):H). Basically, polymorphous semiconductors consist of an amorphous semiconductor matrix with embedded nanocrystals of about 2–3 nm. The pm-Si(x...

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Detalles Bibliográficos
Autores principales:	Jimenez, Ricardo, Moreno, Mario, Torres, Alfonso, Morales, Alfredo, Ponce, Arturo, Ferrusca, Daniel, Rangel-Magdaleno, Jose, Castro-Ramos, Jorge, Hernandez-Perez, Julio, Cano, Eduardo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7273222/ https://www.ncbi.nlm.nih.gov/pubmed/32397557 http://dx.doi.org/10.3390/s20092716

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