Facile synthesis of an aminopropylsilane layer on Si/SiO(2) substrates using ethanol as APTES solvent

(3-aminopropyl)triethoxysilane (APTES) is a commonly used organosilane on surface functionalization of silicon oxide surfaces. However, its deposition process from solution-phase usually involves the use of toluene, which has often been identified as crucial for the formation of an aminopropylsilane monolayer. Toluene is ranked as a problematic solvent in the guide developed by a group referred to as the solvent sub-team of CHEM21. In this work, we propose a facile synthetic route for functionalizing a silicon substrate with APTES via solution-phase approach using only solvents that are classified as recommended. The influence of the APTES concentration, reaction times and different post-deposition conditions using acetic acid and methanol were studied in order to evaluate the quality and thickness of the organosilane layers. • The method uses ethanol as APTES solvent for functionalizing silicon dioxide surfaces and only uses solvents classified as recommended. • The method uses a solution phase approach, does not require complicated equipment and can be prepared at room temperature.