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Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications
A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg(1/3)Nb(2/3))–x%PbTiO3 (PMN–x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7280994/ https://www.ncbi.nlm.nih.gov/pubmed/32438558 http://dx.doi.org/10.3390/mi11050512 |