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Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications

A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg(1/3)Nb(2/3))–x%PbTiO3 (PMN–x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a...

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Detalles Bibliográficos
Autores principales: Lei, Zhihong, Chen, Yan, Xu, Guisheng, Liu, Jinfeng, Yuan, Maodan, Zeng, Lvming, Ji, Xuanrong, Wu, Dawei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7280994/
https://www.ncbi.nlm.nih.gov/pubmed/32438558
http://dx.doi.org/10.3390/mi11050512

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