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PIN-PMN-PT Single Crystal 1-3 Composite-based 20 MHz Ultrasound Phased Array

Based on a modified dice-and-fill technique, a PIN-PMN-PT single crystal 1-3 composite with the kerf of 12 μm and pitch of 50 μm was prepared. The as-made piezoelectric composite material behaved with high piezoelectric constant (d(33) = 1500 pC/N), high electromechanical coefficient (k(t) = 0.81),...

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Detalles Bibliográficos
Autores principales: Zhou, Wei, Zhang, Tao, Ou-Yang, Jun, Yang, Xiaofei, Wu, Dawei, Zhu, Benpeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281135/
https://www.ncbi.nlm.nih.gov/pubmed/32455674
http://dx.doi.org/10.3390/mi11050524
Descripción
Sumario:Based on a modified dice-and-fill technique, a PIN-PMN-PT single crystal 1-3 composite with the kerf of 12 μm and pitch of 50 μm was prepared. The as-made piezoelectric composite material behaved with high piezoelectric constant (d(33) = 1500 pC/N), high electromechanical coefficient (k(t) = 0.81), and low acoustic impedance (16.2 Mrayls). Using lithography and flexible circuit method, a 48-element phased array was successfully fabricated from such a piezoelectric composite. The array element was measured to have a central frequency of 20 MHz and a fractional bandwidth of approximately 77% at −6 dB. Of particular significance was that this PIN-PMN-PT single crystal 1-3 composite-based phased array exhibits a superior insertion loss compared with PMN-PT single crystal and PZT-5H-based 20 MHz phased arrays. The focusing and steering capabilities of the obtained phased array were demonstrated theoretically and experimentally. These promising results indicate that the PIN-PMN-PT single crystal 1-3 composite-based high frequency phased array is a good candidate for ultrasound imaging applications.