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Thin-Film MEMS Resistors with Enhanced Lifetime for Thermal Inkjet

In this paper, the failure mechanisms of the thermal inkjet thin-film resistors are recognized. Additionally, designs of resistors to overcome these mechanisms are suggested and tested by simulation and experiment. The resulting resistors are shown to have improved lifetimes, spanning an order of ma...

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Detalles Bibliográficos
Autores principales: Bar-Levav, Elkana, Witman, Moshe, Einat, Moshe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281151/
https://www.ncbi.nlm.nih.gov/pubmed/32423170
http://dx.doi.org/10.3390/mi11050499

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