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Magnetostrictive Performance of Electrodeposited Tb(x)Dy((1−x))Fe(y) Thin Film with Microcantilever Structures
The microfabrication with a magnetostrictive Tb(x)Dy((1−x))Fe(y) thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of Tb(x)Dy((1−x))Fe(y) is deposited on a metal se...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281386/ https://www.ncbi.nlm.nih.gov/pubmed/32455654 http://dx.doi.org/10.3390/mi11050523 |
| Sumario: | The microfabrication with a magnetostrictive Tb(x)Dy((1−x))Fe(y) thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of Tb(x)Dy((1−x))Fe(y) is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb(0.36)Dy(0.64)Fe(1.9) thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe. |
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