Magnetostrictive Performance of Electrodeposited Tb(x)Dy((1−x))Fe(y) Thin Film with Microcantilever Structures

The microfabrication with a magnetostrictive Tb(x)Dy((1−x))Fe(y) thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of Tb(x)Dy((1−x))Fe(y) is deposited on a metal se...

Descripción completa

Detalles Bibliográficos
Autores principales: Shim, Hang, Sakamoto, Kei, Inomata, Naoki, Toda, Masaya, Toan, Nguyen Van, Ono, Takahito
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281386/
https://www.ncbi.nlm.nih.gov/pubmed/32455654
http://dx.doi.org/10.3390/mi11050523
_version_ 1783543907831775232
author Shim, Hang
Sakamoto, Kei
Inomata, Naoki
Toda, Masaya
Toan, Nguyen Van
Ono, Takahito
author_facet Shim, Hang
Sakamoto, Kei
Inomata, Naoki
Toda, Masaya
Toan, Nguyen Van
Ono, Takahito
author_sort Shim, Hang
collection PubMed
description The microfabrication with a magnetostrictive Tb(x)Dy((1−x))Fe(y) thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of Tb(x)Dy((1−x))Fe(y) is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb(0.36)Dy(0.64)Fe(1.9) thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.
format Online
Article
Text
id pubmed-7281386
institution National Center for Biotechnology Information
language English
publishDate 2020
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-72813862020-06-19 Magnetostrictive Performance of Electrodeposited Tb(x)Dy((1−x))Fe(y) Thin Film with Microcantilever Structures Shim, Hang Sakamoto, Kei Inomata, Naoki Toda, Masaya Toan, Nguyen Van Ono, Takahito Micromachines (Basel) Article The microfabrication with a magnetostrictive Tb(x)Dy((1−x))Fe(y) thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of Tb(x)Dy((1−x))Fe(y) is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb(0.36)Dy(0.64)Fe(1.9) thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe. MDPI 2020-05-21 /pmc/articles/PMC7281386/ /pubmed/32455654 http://dx.doi.org/10.3390/mi11050523 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Shim, Hang
Sakamoto, Kei
Inomata, Naoki
Toda, Masaya
Toan, Nguyen Van
Ono, Takahito
Magnetostrictive Performance of Electrodeposited Tb(x)Dy((1−x))Fe(y) Thin Film with Microcantilever Structures
title Magnetostrictive Performance of Electrodeposited Tb(x)Dy((1−x))Fe(y) Thin Film with Microcantilever Structures
title_full Magnetostrictive Performance of Electrodeposited Tb(x)Dy((1−x))Fe(y) Thin Film with Microcantilever Structures
title_fullStr Magnetostrictive Performance of Electrodeposited Tb(x)Dy((1−x))Fe(y) Thin Film with Microcantilever Structures
title_full_unstemmed Magnetostrictive Performance of Electrodeposited Tb(x)Dy((1−x))Fe(y) Thin Film with Microcantilever Structures
title_short Magnetostrictive Performance of Electrodeposited Tb(x)Dy((1−x))Fe(y) Thin Film with Microcantilever Structures
title_sort magnetostrictive performance of electrodeposited tb(x)dy((1−x))fe(y) thin film with microcantilever structures
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281386/
https://www.ncbi.nlm.nih.gov/pubmed/32455654
http://dx.doi.org/10.3390/mi11050523
work_keys_str_mv AT shimhang magnetostrictiveperformanceofelectrodepositedtbxdy1xfeythinfilmwithmicrocantileverstructures
AT sakamotokei magnetostrictiveperformanceofelectrodepositedtbxdy1xfeythinfilmwithmicrocantileverstructures
AT inomatanaoki magnetostrictiveperformanceofelectrodepositedtbxdy1xfeythinfilmwithmicrocantileverstructures
AT todamasaya magnetostrictiveperformanceofelectrodepositedtbxdy1xfeythinfilmwithmicrocantileverstructures
AT toannguyenvan magnetostrictiveperformanceofelectrodepositedtbxdy1xfeythinfilmwithmicrocantileverstructures
AT onotakahito magnetostrictiveperformanceofelectrodepositedtbxdy1xfeythinfilmwithmicrocantileverstructures

Ejemplares similares