A Review of MEMS Capacitive Microphones

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrica...

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Autores principales: Zawawi, Siti Aisyah, Hamzah, Azrul Azlan, Majlis, Burhanuddin Yeop, Mohd-Yasin, Faisal
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281444/
https://www.ncbi.nlm.nih.gov/pubmed/32397340
http://dx.doi.org/10.3390/mi11050484
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author Zawawi, Siti Aisyah
Hamzah, Azrul Azlan
Majlis, Burhanuddin Yeop
Mohd-Yasin, Faisal
author_facet Zawawi, Siti Aisyah
Hamzah, Azrul Azlan
Majlis, Burhanuddin Yeop
Mohd-Yasin, Faisal
author_sort Zawawi, Siti Aisyah
collection PubMed
description This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.
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spelling pubmed-72814442020-06-19 A Review of MEMS Capacitive Microphones Zawawi, Siti Aisyah Hamzah, Azrul Azlan Majlis, Burhanuddin Yeop Mohd-Yasin, Faisal Micromachines (Basel) Review This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor. MDPI 2020-05-08 /pmc/articles/PMC7281444/ /pubmed/32397340 http://dx.doi.org/10.3390/mi11050484 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Review
Zawawi, Siti Aisyah
Hamzah, Azrul Azlan
Majlis, Burhanuddin Yeop
Mohd-Yasin, Faisal
A Review of MEMS Capacitive Microphones
title A Review of MEMS Capacitive Microphones
title_full A Review of MEMS Capacitive Microphones
title_fullStr A Review of MEMS Capacitive Microphones
title_full_unstemmed A Review of MEMS Capacitive Microphones
title_short A Review of MEMS Capacitive Microphones
title_sort review of mems capacitive microphones
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281444/
https://www.ncbi.nlm.nih.gov/pubmed/32397340
http://dx.doi.org/10.3390/mi11050484
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