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Annealing and N(2) Plasma Treatment to Minimize Corrosion of SiC-Coated Glass-Ceramics
To improve the chemical durability of SiC-based coatings on glass-ceramics, the effects of annealing and N(2) plasma treatment were investigated. Fluorapatite glass-ceramic disks were coated with SiC via plasma-enhanced chemical vapor deposition (PECVD), treated with N(2) plasma followed by an annea...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7287612/ https://www.ncbi.nlm.nih.gov/pubmed/32455653 http://dx.doi.org/10.3390/ma13102375 |