Development, Characterisation and High-Temperature Suitability of Thin-Film Strain Gauges Directly Deposited with a New Sputter Coating System

New sensor and sensor manufacturing technologies are identified as a key factor for a successful digitalisation and are therefore economically important for manufacturers and industry. To address various requirements, a new sputter coating system has been invented at the Institute of Micro Productio...

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Detalles Bibliográficos
Autores principales: Klaas, Daniel, Ottermann, Rico, Dencker, Folke, Wurz, Marc Christopher
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7308930/
https://www.ncbi.nlm.nih.gov/pubmed/32531874
http://dx.doi.org/10.3390/s20113294

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7308930/
https://www.ncbi.nlm.nih.gov/pubmed/32531874
http://dx.doi.org/10.3390/s20113294

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