CuO-Ga(2)O(3) Thin Films as a Gas-Sensitive Material for Acetone Detection

The p-n heterostructures of CuO-Ga(2)O(3) obtained by magnetron sputtering technology in a fully reactive mode (deposition in pure oxygen) were tested under exposure to low acetone concentrations. After deposition, the films were annealed at previously confirmed conditions (400 °C/4 h/synthetic air)...

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Detalles Bibliográficos
Autores principales: Dyndal, Katarzyna, Zarzycki, Arkadiusz, Andrysiewicz, Wojciech, Grochala, Dominik, Marszalek, Konstanty, Rydosz, Artur
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7309060/
https://www.ncbi.nlm.nih.gov/pubmed/32498287
http://dx.doi.org/10.3390/s20113142
Descripción
Sumario:The p-n heterostructures of CuO-Ga(2)O(3) obtained by magnetron sputtering technology in a fully reactive mode (deposition in pure oxygen) were tested under exposure to low acetone concentrations. After deposition, the films were annealed at previously confirmed conditions (400 °C/4 h/synthetic air) and further investigated by utilization of X-ray diffraction (XRD), X-ray reflectivity (XRR), energy-dispersive X-ray spectroscopy (EDS). The gas-sensing behavior was tested in the air/acetone atmosphere in the range of 0.1–1.25 ppm, as well as at various relative humidity (RH) levels (10–85%). The highest responses were obtained for samples based on the CuO-Ga(2)O(3) (4% at. Ga).

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