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Ultrasmall, Ultracompact and Ultrahigh Efficient InGaN Micro Light Emitting Diodes (μLEDs) with Narrow Spectral Line Width

[Image: see text] Augmented reality and visual reality (AR and VR) microdisplays require micro light emitting diodes (μLEDs) with an ultrasmall dimension (≤5 μm), high external quantum efficiency (EQE), and narrow spectral line width. Unfortunately, dry etching which is the most crucial step for the...

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Detalles Bibliográficos
Autores principales:	Bai, Jie, Cai, Yuefei, Feng, Peng, Fletcher, Peter, Zhu, Chenqi, Tian, Ye, Wang, Tao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2020
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7315628/ https://www.ncbi.nlm.nih.gov/pubmed/32453549 http://dx.doi.org/10.1021/acsnano.0c01180

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