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Efficient NH(3)-based process to remove chlorine from electron beam deposited ruthenium produced from (η(3)-C(3)H(5))Ru(CO)(3)Cl

The fabrication of Ru nanostructures by focused electron beam induced deposition (FEBID) requires suitable precursor molecules and processes to obtain the pure metal. So far this is problematic because established organometallic Ru precursors contain large organic ligands, such as cyclopentadienyl a...

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Detalles Bibliográficos
Autores principales:	Rohdenburg, Markus, Boeckers, Hannah, Brewer, Christopher R., McElwee-White, Lisa, Swiderek, Petra
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7331610/ https://www.ncbi.nlm.nih.gov/pubmed/32616780 http://dx.doi.org/10.1038/s41598-020-67803-y

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