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Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM

In this work, the localized electrochemical micro additive manufacturing technology based on the FluidFM (fluidic force microscope) has been introduced to fabricate micro three-dimensional overhang metal structures at sub-micron resolution. It breaks through the localized deposition previously achie...

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Detalles Bibliográficos
Autores principales: Ren, Wanfei, Xu, Jinkai, Lian, Zhongxu, Yu, Peng, Yu, Huadong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345769/
https://www.ncbi.nlm.nih.gov/pubmed/32575589
http://dx.doi.org/10.3390/ma13122783
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author Ren, Wanfei
Xu, Jinkai
Lian, Zhongxu
Yu, Peng
Yu, Huadong
author_facet Ren, Wanfei
Xu, Jinkai
Lian, Zhongxu
Yu, Peng
Yu, Huadong
author_sort Ren, Wanfei
collection PubMed
description In this work, the localized electrochemical micro additive manufacturing technology based on the FluidFM (fluidic force microscope) has been introduced to fabricate micro three-dimensional overhang metal structures at sub-micron resolution. It breaks through the localized deposition previously achieved by micro-anode precision movement, and the micro-injection of the electrolyte is achieved in a stable electric field distribution. The structure of electrochemical facilities has been designed and optimized. More importantly, the local electrochemical deposition process has been analyzed with positive source diffusion, and the mathematical modeling has been revealed in the particle conversion process. A mathematical model is proposed for the species flux under the action of pulsed pressure in an innovatively localized liquid feeding process. Besides, the linear structure, bulk structure, complex structure, and large-area structure of the additive manufacturing are analyzed separately. The experimental diameter of the deposited cylinder structure is linearly fitted. The aspect ratio of the structure is greater than 20, the surface roughness value is between 0.1–0.2 μm at the surface of bulk structures, and the abilities are verified for deposition of overhang, hollow complex structures. Moreover, this work verifies the feasibility of 3D overhang array submicron structure additive manufacturing, with the application of pulsed pressure. Furthermore, this technology opens new avenues for the direct fabrication of nano circuit interconnection, tiny sensors, and micro antennas.
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spelling pubmed-73457692020-07-09 Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM Ren, Wanfei Xu, Jinkai Lian, Zhongxu Yu, Peng Yu, Huadong Materials (Basel) Article In this work, the localized electrochemical micro additive manufacturing technology based on the FluidFM (fluidic force microscope) has been introduced to fabricate micro three-dimensional overhang metal structures at sub-micron resolution. It breaks through the localized deposition previously achieved by micro-anode precision movement, and the micro-injection of the electrolyte is achieved in a stable electric field distribution. The structure of electrochemical facilities has been designed and optimized. More importantly, the local electrochemical deposition process has been analyzed with positive source diffusion, and the mathematical modeling has been revealed in the particle conversion process. A mathematical model is proposed for the species flux under the action of pulsed pressure in an innovatively localized liquid feeding process. Besides, the linear structure, bulk structure, complex structure, and large-area structure of the additive manufacturing are analyzed separately. The experimental diameter of the deposited cylinder structure is linearly fitted. The aspect ratio of the structure is greater than 20, the surface roughness value is between 0.1–0.2 μm at the surface of bulk structures, and the abilities are verified for deposition of overhang, hollow complex structures. Moreover, this work verifies the feasibility of 3D overhang array submicron structure additive manufacturing, with the application of pulsed pressure. Furthermore, this technology opens new avenues for the direct fabrication of nano circuit interconnection, tiny sensors, and micro antennas. MDPI 2020-06-19 /pmc/articles/PMC7345769/ /pubmed/32575589 http://dx.doi.org/10.3390/ma13122783 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Ren, Wanfei
Xu, Jinkai
Lian, Zhongxu
Yu, Peng
Yu, Huadong
Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM
title Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM
title_full Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM
title_fullStr Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM
title_full_unstemmed Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM
title_short Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM
title_sort modeling and experimental study of the localized electrochemical micro additive manufacturing technology based on the fluidfm
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345769/
https://www.ncbi.nlm.nih.gov/pubmed/32575589
http://dx.doi.org/10.3390/ma13122783
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