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Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors

A technique and electronic circuit for contactless electromagnetic interrogation of piezoelectric micro-electromechanical system (MEMS) resonator sensors are proposed. The adopted resonator is an aluminum-nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) disk vibrating in radial contour mode a...

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Detalles Bibliográficos
Autores principales:	Baù, Marco, Ferrari, Marco, Begum, Habiba, Ali, Abid, Lee, Joshua E.-Y., Ferrari, Vittorio
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7349374/ https://www.ncbi.nlm.nih.gov/pubmed/32575658 http://dx.doi.org/10.3390/s20123483

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