Measurement of In-Plane Motions in MEMS

We report a technique to measure in-plane and out-of-plane motions of MEMS using typical out-of-plane (single-axis) Laser Doppler Vibrometers (LDVs). The efficacy of the technique is demonstrated by evaluating the in-plane and out-of-plane modal response and frequency response of an interdigitated c...

Descripción completa

Detalles Bibliográficos
Autores principales: Arabi, Mohamed, Gopanchuk, Mary, Abdel-Rahman, Eihab, Yavuz, Mustafa
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Letter
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7349389/
https://www.ncbi.nlm.nih.gov/pubmed/32630484
http://dx.doi.org/10.3390/s20123594
_version_ 1783557052648390656
author Arabi, Mohamed
Gopanchuk, Mary
Abdel-Rahman, Eihab
Yavuz, Mustafa
author_facet Arabi, Mohamed
Gopanchuk, Mary
Abdel-Rahman, Eihab
Yavuz, Mustafa
author_sort Arabi, Mohamed
collection PubMed
description We report a technique to measure in-plane and out-of-plane motions of MEMS using typical out-of-plane (single-axis) Laser Doppler Vibrometers (LDVs). The efficacy of the technique is demonstrated by evaluating the in-plane and out-of-plane modal response and frequency response of an interdigitated comb-drive actuator. We also investigate the validity of observing planar modes of vibration outside their dominant plane of motion and find that it leads to erroneous results. Planar modes must be evaluated in their plan of motion.
format Online
Article
Text
id pubmed-7349389
institution National Center for Biotechnology Information
language English
publishDate 2020
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-73493892020-07-22 Measurement of In-Plane Motions in MEMS Arabi, Mohamed Gopanchuk, Mary Abdel-Rahman, Eihab Yavuz, Mustafa Sensors (Basel) Letter We report a technique to measure in-plane and out-of-plane motions of MEMS using typical out-of-plane (single-axis) Laser Doppler Vibrometers (LDVs). The efficacy of the technique is demonstrated by evaluating the in-plane and out-of-plane modal response and frequency response of an interdigitated comb-drive actuator. We also investigate the validity of observing planar modes of vibration outside their dominant plane of motion and find that it leads to erroneous results. Planar modes must be evaluated in their plan of motion. MDPI 2020-06-25 /pmc/articles/PMC7349389/ /pubmed/32630484 http://dx.doi.org/10.3390/s20123594 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Letter
Arabi, Mohamed
Gopanchuk, Mary
Abdel-Rahman, Eihab
Yavuz, Mustafa
Measurement of In-Plane Motions in MEMS
title Measurement of In-Plane Motions in MEMS
title_full Measurement of In-Plane Motions in MEMS
title_fullStr Measurement of In-Plane Motions in MEMS
title_full_unstemmed Measurement of In-Plane Motions in MEMS
title_short Measurement of In-Plane Motions in MEMS
title_sort measurement of in-plane motions in mems
topic Letter
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7349389/
https://www.ncbi.nlm.nih.gov/pubmed/32630484
http://dx.doi.org/10.3390/s20123594
work_keys_str_mv AT arabimohamed measurementofinplanemotionsinmems
AT gopanchukmary measurementofinplanemotionsinmems
AT abdelrahmaneihab measurementofinplanemotionsinmems
AT yavuzmustafa measurementofinplanemotionsinmems

Ejemplares similares