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Measurement of In-Plane Motions in MEMS

We report a technique to measure in-plane and out-of-plane motions of MEMS using typical out-of-plane (single-axis) Laser Doppler Vibrometers (LDVs). The efficacy of the technique is demonstrated by evaluating the in-plane and out-of-plane modal response and frequency response of an interdigitated c...

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Detalles Bibliográficos
Autores principales:	Arabi, Mohamed, Gopanchuk, Mary, Abdel-Rahman, Eihab, Yavuz, Mustafa
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Letter
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7349389/ https://www.ncbi.nlm.nih.gov/pubmed/32630484 http://dx.doi.org/10.3390/s20123594

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