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Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating
This paper presents the fabrication by means of roll-to-roll slot-die coating and characterization of air gap-based cantilever type capacitive acceleration sensors. As the mass of the sensor moves in the opposite direction of the acceleration, a capacitance change occurs. The sensor is designed to h...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7374456/ https://www.ncbi.nlm.nih.gov/pubmed/32635459 http://dx.doi.org/10.3390/s20133748 |