Metallic glass coating for improving diamond dicing performance

This is the first report on the coating of diamond dicing blades with metallic glass (MG) coating to reduce chipping when used to cut Si, SiC, sapphire, and patterned sapphire substrates (PSS). The low coefficient-of-friction (CoF) of Zr-based MG-coated dicing blades was shown to reduce the number a...

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Detalles Bibliográficos
Autores principales: Chu, Jinn P., Lai, Bo-Zhang, Yiu, Pakman, Shen, Yu-Lin, Chang, Chia-Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7381673/
https://www.ncbi.nlm.nih.gov/pubmed/32709992
http://dx.doi.org/10.1038/s41598-020-69399-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7381673/
https://www.ncbi.nlm.nih.gov/pubmed/32709992
http://dx.doi.org/10.1038/s41598-020-69399-9

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