Defect spectroscopy on the dielectric material aluminum oxide

A method for defect characterization is presented that allows to measure the activation energy, capture cross-section, and defect density in dielectric materials. This is exemplarily performed on aluminum oxide thin films deposited on hydrogen-terminated diamond. During the measurement, samples were...

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Detalles Bibliográficos
Autores principales: Oing, Dennis, Geller, Martin, Stahl, Lucas, Kerski, Jens, Lorke, Axel, Wöhrl, Nicolas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7385164/
https://www.ncbi.nlm.nih.gov/pubmed/32719320
http://dx.doi.org/10.1038/s41598-020-69240-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7385164/
https://www.ncbi.nlm.nih.gov/pubmed/32719320
http://dx.doi.org/10.1038/s41598-020-69240-3

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