Study on Functionality and Surface Modification of a Stair-Step Liquid-Triggered Valve for On-Chip Flow Control

Distinctive from other forms of microfluidic system, capillary microfluidics is of great interest in autonomous micro-systems due to its well-engineered fluidic control based on capillary force. As an essential component of fluidic control in capillaric circuits, micro-valves enable sequential fluidic operations by performing actions such as stopping and triggering. In this paper, we present a stair-step liquid-triggered valve; the functionality of the valve and its dependencies on geometry and surface modification are studied. The surface contact angle of the microfabricated valves that are coated by polyethylene glycol (PEG) or (3-Aminopropyl) triethoxysilane (APTES) is evaluated experimentally, and the corresponding reliability of the valve structure is discussed. Moreover, the variation in the surface contact angle over time is investigated, indicating the shelf time of the device. We further discuss the overall fluidic behavior in such capillary valves, which benefits the capillaric circuit designs at the initial stage.