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Impact of Improved Design on Knudsen Force for Micro Gas Sensor

Knudsen force generated by thermally driven gas flow in a microscale structure has been used for gas detection and has shown immeasurable potential in the field of microelectromechanical system (MEMS) gas sensors due to its novel sensing characteristics. In this article, the performances of three ki...

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Detalles Bibliográficos
Autores principales:	Wang, Xiaowei, Zhang, Zhijun, Zhang, Wenqing, Su, Tianyi, Zhang, Shiwei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7408172/ https://www.ncbi.nlm.nih.gov/pubmed/32605326 http://dx.doi.org/10.3390/mi11070634

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