Cargando…

Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching

This work reports a batch fabrication process for silicon nanometer tip based on isotropic inductively coupled plasma (ICP) etching technology. The silicon tips with nanometer apex and small surface roughness are produced at wafer-level with good etching homogeneity and repeatability. An ICP etching...

Descripción completa

Detalles Bibliográficos
Autores principales:	Wang, Lihao, Liu, Meijie, Zhao, Junyuan, Zhao, Jicong, Zhu, Yinfang, Yang, Jinling, Yang, Fuhua
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7408416/ https://www.ncbi.nlm.nih.gov/pubmed/32610624 http://dx.doi.org/10.3390/mi11070638

Ejemplares similares

Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip
por: Liu, Meijie, et al.
Publicado: (2021)

Enhanced Binding Efficiency of Microcantilever Biosensor for the Detection of Yersinia
por: Liu, Xiaochen, et al.
Publicado: (2019)

A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10,000
por: Liu, Wenli, et al.
Publicado: (2023)

Isotropic ordering of ions in ionic liquids on the sub-nanometer scale
por: Chen, Hailong, et al.
Publicado: (2017)

Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching
por: Ma, Jing, et al.
Publicado: (2021)

Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process
por: Hosseini, Nahid, et al.
Publicado: (2019)

Effects of Mask Material on Lateral Undercut of Silicon Dry Etching
por: Zhang, Yongkang, et al.
Publicado: (2023)

Tip-Enhanced Raman Imaging and Nano Spectroscopy of Etched Silicon Nanowires
por: Kazemi-Zanjani, Nastaran, et al.
Publicado: (2013)

Fabrication of Silicon Nanowires by Metal-Assisted Chemical Etching Combined with Micro-Vibration
por: Huang, Weiye, et al.
Publicado: (2023)

Fabrication and Characterization of Isotropic and Anisotropic Magnetorheological Elastomers, Based on Silicone Rubber and Carbonyl Iron Microparticles
por: Puente-Córdova, Jesús G., et al.
Publicado: (2018)

Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process
por: Wittek, Christian-G. R., et al.
Publicado: (2023)

Nanometer size silicon particles for hyperpolarized MRI
por: Kwiatkowski, Grzegorz, et al.
Publicado: (2017)

Optical assessment of silicon nanowire arrays fabricated by metal-assisted chemical etching
por: Kato, Shinya, et al.
Publicado: (2013)

Isotropic Atomic Layer Etching of ZnO Using Acetylacetone and O(2) Plasma
por: Mameli, A., et al.
Publicado: (2018)

Low cost tips for tip-enhanced Raman spectroscopy fabricated by two-step electrochemical etching of 125 µm diameter gold wires
por: Foti, Antonino, et al.
Publicado: (2018)

A Review: Inductively Coupled Plasma Reactive Ion Etching of Silicon Carbide
por: Racka-Szmidt, Katarzyna, et al.
Publicado: (2021)

Fabrication of Ultra-Sharp Tips by Dynamic Chemical Etching Process for Scanning Near-Field Microwave Microscopy
por: Joseph, C. H., et al.
Publicado: (2023)

Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching
por: Liu, Ruiyuan, et al.
Publicado: (2013)

Template-free fabrication of silicon micropillar/nanowire composite structure by one-step etching
por: Bai, Fan, et al.
Publicado: (2012)

Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching
por: Shi, Zhitian, et al.
Publicado: (2020)

Nanometer collimation enhancement of ion beams using channeling effects in track-etched mica capillaries
por: Scheuner, Clemens, et al.
Publicado: (2017)

Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching
por: Mata-Hernandez, Diana, et al.
Publicado: (2020)

Fabricating sub-nanometer materials through cluster assembly
por: Liu, Qingda, et al.
Publicado: (2022)

Fabrication of sharp silicon hollow microneedles by deep-reactive ion etching towards minimally invasive diagnostics
por: Li, Yan, et al.
Publicado: (2019)

Nonlinear Etch Rate of Au-Assisted Chemical Etching of Silicon
por: Choi, Keorock, et al.
Publicado: (2017)

Deep Etching of Silicon Based on Metal-Assisted Chemical Etching
por: Nur’aini, Anafi, et al.
Publicado: (2022)

Effect of Electric Field Gradient on Sub-nanometer Spatial Resolution of Tip-enhanced Raman Spectroscopy
por: Meng, Lingyan, et al.
Publicado: (2015)

Fabrication of porous silicon by metal-assisted etching using highly ordered gold nanoparticle arrays
por: Scheeler, Sebastian P, et al.
Publicado: (2012)

Silicon Nanotubes Fabricated by Wet Chemical Etching of ZnO/Si Core–Shell Nanowires
por: Sun, Yong-Lie, et al.
Publicado: (2020)

Reduction of Nitroaromatics by Gold Nanoparticles on Porous Silicon Fabricated Using Metal-Assisted Chemical Etching
por: Liang, Ling-Yi, et al.
Publicado: (2023)

Ultrafast Carrier Relaxation Dynamics in Quantum Confined Non-Isotropic Silicon Nanostructures Synthesized by an Inductively Coupled Plasma Process
por: Ponzoni, Stefano, et al.
Publicado: (2020)

A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers
por: He, Yurong, et al.
Publicado: (2021)

Three-dimensional chiral microstructures fabricated by structured optical vortices in isotropic material
por: Ni, Jincheng, et al.
Publicado: (2017)

Fabrication of a Silicon Electron Multiplier sensor using Metal Assisted Chemical Etching and its characterisation
por: Halvorsen, Marius Mæhlum, et al.
Publicado: (2023)

Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method
por: Dang, Zhiya, et al.
Publicado: (2012)

Structural and Optical Properties of Silicon Nanowire Arrays Fabricated by Metal Assisted Chemical Etching With Ammonium Fluoride
por: Gonchar, Kirill A., et al.
Publicado: (2019)

Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching
por: Khan, Muhammad Shuja, et al.
Publicado: (2015)

The Enhanced Light Absorptance and Device Application of Nanostructured Black Silicon Fabricated by Metal-assisted Chemical Etching
por: Zhong, Hao, et al.
Publicado: (2016)

Fabrication of Partially Etched Polystyrene Nanoparticles
por: Jung, In Hwan, et al.
Publicado: (2023)

Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage
por: Chen, Zeji, et al.
Publicado: (2020)

Cannot write session to /tmp/vufind_sessions/sess_jv2l8d1qkck9uej8eokkocudsd