Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration

A micro vibratory platform driven by converse piezoelectric effects is a promising in-situ recalibration platform to eliminate the influence of bias and scale factor drift caused by long-term storage of micro-electro–mechanical system (MEMS) inertial sensors. The calibration accuracy is critically determined by the stable and repeatable vibration of platform, and it is unavoidably impacted by the residual stress of micro structures and lead zirconate titanate (PZT) hysteresis. The abnormal phenomenon of the observed displacement response in experiments was investigated analytically using the stiffness model of beams and hysteresis model of piezoelectric material. Rather than the hysteresis, the initial deflection formed by the residual stress of the beam was identified as the main cause of the response error around the zero position. This conclusion provides guidelines to improve the performance and control of micro vibratory platforms.