Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration

A micro vibratory platform driven by converse piezoelectric effects is a promising in-situ recalibration platform to eliminate the influence of bias and scale factor drift caused by long-term storage of micro-electro–mechanical system (MEMS) inertial sensors. The calibration accuracy is critically d...

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Detalles Bibliográficos
Autores principales: Hao, Rui, Yu, Huijun, Peng, Bei, Zhan, Haixiang, Zhou, Wu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7411899/
https://www.ncbi.nlm.nih.gov/pubmed/32708776
http://dx.doi.org/10.3390/s20143959

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7411899/
https://www.ncbi.nlm.nih.gov/pubmed/32708776
http://dx.doi.org/10.3390/s20143959

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