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Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration
A micro vibratory platform driven by converse piezoelectric effects is a promising in-situ recalibration platform to eliminate the influence of bias and scale factor drift caused by long-term storage of micro-electro–mechanical system (MEMS) inertial sensors. The calibration accuracy is critically d...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7411899/ https://www.ncbi.nlm.nih.gov/pubmed/32708776 http://dx.doi.org/10.3390/s20143959 |