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Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed...

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Detalles Bibliográficos
Autores principales:	Wang, Chen, Chen, Fang, Wang, Yuan, Sadeghpour, Sina, Wang, Chenxi, Baijot, Mathieu, Esteves, Rui, Zhao, Chun, Bai, Jian, Liu, Huafeng, Kraft, Michael
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7411979/ https://www.ncbi.nlm.nih.gov/pubmed/32708191 http://dx.doi.org/10.3390/s20144054

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