Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions

TiNi shape-memory-alloy thin films can be used as small high-speed actuators or sensors because they exhibit a rapid response rate. In recent years, the transformation temperature of these films, manufactured via a magnetron sputtering method, was found to be lower than that of the bulk alloys owing...

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Autores principales: Bae, Joohyeon, Lee, Hyunsuk, Seo, Duckhyeon, Yun, Sangdu, Yang, Jeonghyeon, Huh, Sunchul, Jeong, Hyomin, Noh, Jungpil
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7412040/
https://www.ncbi.nlm.nih.gov/pubmed/32698445
http://dx.doi.org/10.3390/ma13143229
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author Bae, Joohyeon
Lee, Hyunsuk
Seo, Duckhyeon
Yun, Sangdu
Yang, Jeonghyeon
Huh, Sunchul
Jeong, Hyomin
Noh, Jungpil
author_facet Bae, Joohyeon
Lee, Hyunsuk
Seo, Duckhyeon
Yun, Sangdu
Yang, Jeonghyeon
Huh, Sunchul
Jeong, Hyomin
Noh, Jungpil
author_sort Bae, Joohyeon
collection PubMed
description TiNi shape-memory-alloy thin films can be used as small high-speed actuators or sensors because they exhibit a rapid response rate. In recent years, the transformation temperature of these films, manufactured via a magnetron sputtering method, was found to be lower than that of the bulk alloys owing to the small size of the grain. In this study, deposition conditions (growth rate, film thickness, and substrate temperature) affecting the grain size of thin films were investigated. The grain size of the thin film alloys was found to be most responsive to the substrate temperature.
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spelling pubmed-74120402020-08-25 Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions Bae, Joohyeon Lee, Hyunsuk Seo, Duckhyeon Yun, Sangdu Yang, Jeonghyeon Huh, Sunchul Jeong, Hyomin Noh, Jungpil Materials (Basel) Article TiNi shape-memory-alloy thin films can be used as small high-speed actuators or sensors because they exhibit a rapid response rate. In recent years, the transformation temperature of these films, manufactured via a magnetron sputtering method, was found to be lower than that of the bulk alloys owing to the small size of the grain. In this study, deposition conditions (growth rate, film thickness, and substrate temperature) affecting the grain size of thin films were investigated. The grain size of the thin film alloys was found to be most responsive to the substrate temperature. MDPI 2020-07-20 /pmc/articles/PMC7412040/ /pubmed/32698445 http://dx.doi.org/10.3390/ma13143229 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Bae, Joohyeon
Lee, Hyunsuk
Seo, Duckhyeon
Yun, Sangdu
Yang, Jeonghyeon
Huh, Sunchul
Jeong, Hyomin
Noh, Jungpil
Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions
title Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions
title_full Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions
title_fullStr Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions
title_full_unstemmed Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions
title_short Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions
title_sort grain size and phase transformation behavior of tini shape-memory-alloy thin film under different deposition conditions
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7412040/
https://www.ncbi.nlm.nih.gov/pubmed/32698445
http://dx.doi.org/10.3390/ma13143229
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