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10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

Piezoelectric micromachined ultrasound transducers (PMUT) incorporating lead zirconate titanate PbZr(0.52)Ti(0.48)O(3) (PZT) thin films were investigated for miniaturized high-frequency ultrasound systems. A recently developed process to remove a PMUT from an underlying silicon (Si) substrate has en...

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Detalles Bibliográficos
Autores principales:	Kim, Jeong Nyeon, Liu, Tianning, Jackson, Thomas N., Choi, Kyusun, Trolier-McKinstry, Susan, Tutwiler, Richard L., Todd, Judith A.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7435793/ https://www.ncbi.nlm.nih.gov/pubmed/32759665 http://dx.doi.org/10.3390/s20154335

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