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Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature
A surface acoustic wave (SAW) device with an aluminum nitride (AlN) composite structure of Al(2)O(3)/IDTs/AlN/Metal/Si was proposed for sensing at extreme high-temperature in this work. Optimization allowing determination of optimal design parameters for SAW devices was conducted using the typical c...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7435944/ https://www.ncbi.nlm.nih.gov/pubmed/32726902 http://dx.doi.org/10.3390/s20154160 |
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author | Fan, Shuyao Wang, Wen Li, Xueling Jia, Yana Sun, Yuan Liu, Mengwei |
author_facet | Fan, Shuyao Wang, Wen Li, Xueling Jia, Yana Sun, Yuan Liu, Mengwei |
author_sort | Fan, Shuyao |
collection | PubMed |
description | A surface acoustic wave (SAW) device with an aluminum nitride (AlN) composite structure of Al(2)O(3)/IDTs/AlN/Metal/Si was proposed for sensing at extreme high-temperature in this work. Optimization allowing determination of optimal design parameters for SAW devices was conducted using the typical coupling of modes (COM) model. The SAW propagation characteristics in the layered structure were investigated theoretically by employing the finite element method (FEM). Multiple acoustic-wave modes that occurred in the AlN composite structure was analyzed, and the corresponding suppression of spurious mode was proposed. The COM simulation parameters corresponding to the effective acoustic-wave mode were extracted, and the optimized parameters of the one–port SAW resonator with a high-quality factor were determined. |
format | Online Article Text |
id | pubmed-7435944 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2020 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-74359442020-08-24 Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature Fan, Shuyao Wang, Wen Li, Xueling Jia, Yana Sun, Yuan Liu, Mengwei Sensors (Basel) Letter A surface acoustic wave (SAW) device with an aluminum nitride (AlN) composite structure of Al(2)O(3)/IDTs/AlN/Metal/Si was proposed for sensing at extreme high-temperature in this work. Optimization allowing determination of optimal design parameters for SAW devices was conducted using the typical coupling of modes (COM) model. The SAW propagation characteristics in the layered structure were investigated theoretically by employing the finite element method (FEM). Multiple acoustic-wave modes that occurred in the AlN composite structure was analyzed, and the corresponding suppression of spurious mode was proposed. The COM simulation parameters corresponding to the effective acoustic-wave mode were extracted, and the optimized parameters of the one–port SAW resonator with a high-quality factor were determined. MDPI 2020-07-27 /pmc/articles/PMC7435944/ /pubmed/32726902 http://dx.doi.org/10.3390/s20154160 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Letter Fan, Shuyao Wang, Wen Li, Xueling Jia, Yana Sun, Yuan Liu, Mengwei Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature |
title | Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature |
title_full | Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature |
title_fullStr | Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature |
title_full_unstemmed | Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature |
title_short | Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature |
title_sort | optimization of ain composite structure based surface acoustic wave device for potential sensing at extremely high temperature |
topic | Letter |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7435944/ https://www.ncbi.nlm.nih.gov/pubmed/32726902 http://dx.doi.org/10.3390/s20154160 |
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