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Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature

A surface acoustic wave (SAW) device with an aluminum nitride (AlN) composite structure of Al(2)O(3)/IDTs/AlN/Metal/Si was proposed for sensing at extreme high-temperature in this work. Optimization allowing determination of optimal design parameters for SAW devices was conducted using the typical c...

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Detalles Bibliográficos
Autores principales:	Fan, Shuyao, Wang, Wen, Li, Xueling, Jia, Yana, Sun, Yuan, Liu, Mengwei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Letter
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7435944/ https://www.ncbi.nlm.nih.gov/pubmed/32726902 http://dx.doi.org/10.3390/s20154160

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