Thermally assisted nanotransfer printing with sub–20-nm resolution and 8-inch wafer scalability

Nanotransfer printing (nTP) has attracted considerable attention due to its good pattern resolution, process simplicity, and cost-effectiveness. However, the development of a large-area nTP process has been hampered by critical reliability issues related to the uniform replication and regular transf...

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Detalles Bibliográficos
Autores principales: Park, Tae Wan, Byun, Myunghwan, Jung, Hyunsung, Lee, Gyu Rac, Park, Jae Hong, Jang, Hyun-Ik, Lee, Jung Woo, Kwon, Se Hun, Hong, Seungbum, Lee, Jong-Heun, Jung, Yeon Sik, Kim, Kwang Ho, Park, Woon Ik
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Association for the Advancement of Science 2020
Materias:
Research Articles
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7439568/
https://www.ncbi.nlm.nih.gov/pubmed/32832691
http://dx.doi.org/10.1126/sciadv.abb6462

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