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Effect of the Lapping Platen Groove Density on the Characteristics of Microabrasive-Based Lapping
Microabrasive-based lapping is widely used in the manufacturing of single-crystal substrates such as sapphire, SiC, and GaN. Although many studies have been conducted to improve the lapping process characteristics, most of them focused on process conditions or consumables. In this study, the effect...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7463435/ https://www.ncbi.nlm.nih.gov/pubmed/32823978 http://dx.doi.org/10.3390/mi11080775 |