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Epitaxial Growth of Sc(0.09)Al(0.91)N and Sc(0.18)Al(0.82)N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications

Scandium aluminum nitride (Sc(x)Al(1−x)N) films are currently intensively studied for surface acoustic waves (SAW) filters and sensors applications, because of the excellent trade-off they present between high SAW velocity, large piezoelectric properties and wide bandgap for the intermediate composi...

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Detalles Bibliográficos
Autores principales:	Bartoli, Florian, Streque, Jérémy, Ghanbaja, Jaafar, Pigeat, Philippe, Boulet, Pascal, Hage-Ali, Sami, Naumenko, Natalya, Redjaïmia, A., Aubert, Thierry, Elmazria, Omar
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7472616/ https://www.ncbi.nlm.nih.gov/pubmed/32824582 http://dx.doi.org/10.3390/s20164630

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